Flow meter with mass flow controller EL-FLOW® Metal Sealed

thermal massfor gasin-line

Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst are characterised by their unique, internationally patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections. Metal Sealed Mass Flow Meter/Controller with fieldbus interface Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW®design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software. Features Resealable metal-to-metal outer seal construction (no rings) High surface quality of wetted parts Cleanroom assembled Analog and digital I/O, with optionally integrated interface to CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS High accuracy and repeatability Stable control, even at varying process volumes