Analog thermal mass flow controller for gas
10 - 100 slpm | TMF-5851EM-200
Brooks Instrument
TMF-5851EM-200The Brooks Model 5850EM metal sealed mass flow controller accurately measures and controls gas flows in ultraclean environments of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Thermal Mass Flow Controller, 10 - 100 slpm, Metal Seals
TMF-5851EM-200The Brooks Model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 10 - 100 slmp (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
TMF-5851EM-200The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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