Digital thermal mass flow controller
min. 3 sccm, max. 50 slpm | SLA 7950/7960 Brooks Instrument

TMF-SLA7950Brooks Model SLA7900 Series UHP digital thermal mass flow measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SL7900 Series combines superior accuracy of the TruCal process gas calibration system with Brooks’ proprietary control algorithm. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.

Digital, Metal-Sealed Thermal Mass Flow Meter/Controller, 1-1/8” Platform, Metal Seals

TMF-SLA7950Brooks Model SLA7800 Series metal sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SL7800 Series combines superior accuracy of the TruCal process gas calibration system with Brooks’ proprietary control algorithm. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.