thermal mass flow controller / for air / digital
GF80 series Brooks Instrument



  • Technology:

    thermal mass

  • Fluid:

    for air

  • Other characteristics:


  • Flow rate:

    Min.: 0 l/h (0 us gal/h)

    Max.: 18,000 l/h (79 us gal/h)

  • Pressure:

    Min.: 7 psi

    Max.: 90 psi


The GF40 and GF80 series of thermal mass flow controllers and meters is designed for solar film deposition, CVD, bioreactors, and the like. The metal-sealed series can be used in applications that need cost-efficient solutions. The device is capable of 1 second setting time. It consists of a Hastelloy® sensor tube, which can resist corrosion.

The series currently offers models up to 300 slpm.