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thermal mass flow controller

Thermal mass flow controller
3 sccm - 100 slpm / 3 sccm - 2500 slpm


The Brooks line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices. Features include: industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; multiple communication protocols allow easy integration into many control systems; elastomer seals option provides exceptional leak integrity and maximizes control valve shutoff dependability; ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes. Available with traditional analog or digital I/O. Globally approved for a variety of service areas.

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Other products from -

Brooks Instrument

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Emerson Process Management

 
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