Thermal mass flow-meter for gas
min. 3 sccm, max. 2500 slpm Brooks Instrument

TMF-SLA5850Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas.

Digital Thermal Mass Flow Meter/Controller, Elastomer Seals

TMF-5850S-200The Brooks Model 5800S elastomer sealed digital flow controller expands the capability and functionality of Brooks’ Smart Mass Flow Products. Brooks’ proprietary Adaptive Valve Control makes these products virtually insensitive to process interference, ensuring unparalleled performance and fast control, even under varying process conditions. Models available with analog or digital I/O.