The Brooks/MSP 2800 TurboVaporizer system delivers direct liquid-inject vacuum film coating in processes such as Atomic Layer Deposition (ALD) and MOCVD. Carrier gas that is heated to the vaporization temperature of the liquid quickly vaporizes the atomized liquid. This results in low temperature, gentle vaporization that produces a very pure vapor.
The system delivers these outstanding benefits:
1) Superior Coriolis-based flow measurement and control;
2) Perfectly repeatable film properties;
3) Uniform film structure throughout the deposition run;
4) More efficient precursor liquid use due to total and complete vaporization;
5) Complete absence of decomposition products ensuring particle-free films;
6) Remarkable dynamic range, handling precursor flows from a few grams per hour to several thousand grams per hour;
7) The ability of a single vaporizer to handle multiple precursors while ensuring both complete vaporization and complete mixing.
