Infrared diffusion furnace
800 - 1 000 °C | Meridian™ BTU

Phosphorus Diffusion is used in the manufacture of solar cells to create the emitter. Silicon wafers are coated with phosphoric acid fired at temperatures between 800oC and 1000oC to drive the phosphorus into the silicon creating the emitter

Existing batch processes cannot keep pace with the cost pressure facing PV manufacturers today. BTU's solution is the Meridian™ In-Line Diffusion Furnace. The system can be configured to process up to 1,500 wafers per hour providing uniform and repeatable emitters. The Meridian™ in-line system offers reduced wafer handling and very low breakage rates. In the race to lower cost per watt, the shift to in-line processing puts users in a winning position.