Electron probe micro analyzer (EPMA)
SXFive
CAMECA
Electron Probe Micro Analyzer for Materials & Geosciences
Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in geochemistry, mineralogy, geochronology, physical and nuclear metallurgy, material sciences (including cements, glass, ceramics …), biochemistry, microelectronics…
The SXFive comes equipped with a versatile electron gun compatible with W and LaB6. The beam current is continuously regulated, achieving a stability of 0.3% per 12 hours, thus enabling reliable long term quantitative analyses. The beam intensity is accurately measured thanks to an annular Faraday cup and electrostatic deflection. The high voltage system operates at up to 30 kV for elements with high atomic number. High intensity beam currents (several µA) may be used for trace element measurements and high speed X-ray mapping.
The SXFive can be upgraded with a Field Emission source (see SXFiveFE model).
