Secondary ion mass spectrometer (SIMS) for semiconductor industry Cameca

The CAMECA SIMS 4600 is a full-wafer quadrupole SIMS with top performances in next generation semiconductor element depth profiling. Based on the experience gained with the SIMS 4550, it provides the same performances but add the 200mm or 300mm full wafer analyis and mapping capabilities (see example below). The wafers are handled horizontally and the geometry has been optimized in order to be compatible with:
- single normal incidence oxygen FLIG gun or
- dual beam configuration (normal oxygen FLIG and 60° cesium FLIG ion guns).

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