Analytical field emission scanning electron microscope (FE-SEM)
MERLIN
Carl Zeiss Nano Technology Systems
Analytical Power for the Sub-Nanometer World
-Nano Analytics
-Total Information
-Ease of Use
-Future Assured
MERLIN™ - analysis and high resolution in one
The MERLIN FE-SEM overcomes the conflict between image resolution and analytical capability. The core of MERLIN is the enhanced GEMINI II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence.
The system supports the user with a wide range of detailed solutions for tasks that could not be adequately performed in the past. The foundation for this achievement has been laid by the Carl Zeiss "Complete Detection System". This consists of the in-lens SE detector for surface imaging, the in-lens EsB detector for material contrast and the AsB detector for widely dispersed backscattered electrons. The latter contain specific information on the crystal orientation of the sample.
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