Field emission scanning electron microscope (FE-SEM) with EsB (in-column)
ULTRA Carl Zeiss Nano Technology Systems

The ULTRA FESEM, based on the SUPRA%uF0D4 FESEM comprises a high efficiency, ultra high resolution In-column EsB detector which enables nano-scale compositional BSE imaging. The newly developed Energy selective Backscattered (EsB) detector represents the latest developments of the renowned GEMINI®technology. The ULTRA incorporates the GEMINI® In-lens SE detector for crisp topographic imaging and the EsB detector for clear compositional contrast. Simultaneous real-time imaging and mixing of both signals offers ultimate imaging capabilities. The EsB detector comprises a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.