Field emission scanning electron microscope (FE-SEM) Carl Zeiss SMT Nano Technology Systems Division
SUPRA

The answer to modern nano science challenges is the unique GEMINI® field emission SEM column, a sophisticated solution recognised by microscopists worldwide as the leader. The new SUPRA™ series, based on the 3rd generation GEMINI® column, offers a complete range of ultra high resolution FESEMs models to cover all fields of applications in nano technology, cryo, nano structural materials analysis and semiconductor development and failure analysis.
The key advantages of the GEMINI® FESEM column are superb resolution down to 0.1kV, high efficiency In-lens SE detector, minimal adjustments when changing operating voltage and low magnetic fields at specimen level. The SUPRA's unique variable pressure (VP) capability enables examination of non-conducting specimens without time consuming preparation. The versatile analytical ultra high resolution FESEM concept extends imaging and analytical resolution beyond previously achievable limits.

More specifications...