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scanning electron microscope

Scanning electron microscope (SEM)
EVO


EVO® MA and LS Series SEM
Driven by applications

The EVO® series SEM has evolved to provide users in Materials Analysis and Life Science with microscopes designed to match their needs. Both microscopes series share some key features.

Key features
- Class leading x-ray geometry
- Class leading secondary electron imaging in variable pressure
- High brightness LaB6 source option
- Clean pumping technology with fast pumpdown
- High repeatability stage with large stage movements

The EVO® MA 10, EVO® MA 15 and EVO® MA 25 microscopes provide, as standard, the capability to use variable pressure (VP) operation.

The EVO® LS 10, EVO® LS 15 and EVO® LS 25 microscopes are environmental SEMs providing, as standard, the capability to prevent dehydration artefacts in the microscopy of life science specimens.

The EVO® MA and LS series ensures the perfect solution to every application requirement.


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Carl Zeiss SMT - Nano Technology Systems Division

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