Field emission scanning electron microscope (FE-SEM) with EsB (in-column) Carl Zeiss SMT
ULTRA

The ULTRA FESEM, based on the SUPRA FESEM comprises a high efficiency, ultra high resolution In-column EsB detector which enables nano-scale compositional BSE imaging. The newly developed Energy selective Backscattered (EsB) detector represents the latest developments of the renowned GEMINI®technology. The ULTRA incorporates the GEMINI® In-lens SE detector for crisp topographic imaging and the EsB detector for clear compositional contrast. Simultaneous real-time imaging and mixing of both signals offers ultimate imaging capabilities. The EsB detector comprises a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.

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