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piezoelectric stage

Piezoelectric XY stage
XY200M


The piezoelectric stage XY200M is based on the APA200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes and optical tweezer.

Max No-load displacement (µm): 180
Dimensions (mm): 18*100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 550

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