LED wafer inspection machine
Chroma Ate Europe
* High speed inspection for LED wafer
* Auto Compensation for wafer Z-axis leveling
* Fast auto focus are using for clearly acquisition images
* Software edge finding technology can be applied to different shape of wafer
* Advance and flexible illumination modules are suitable for surface-textured and non-textured LED die
* Inspection mapping file can be output for down-stream sorter
* Adjustable inspection criteria can be set for different type LED die








