Coherent has established optimized, field proven on excimer laser portfolio RK
all performance level:

- light compact (UV) ultraviolet SOURCEs
- high power excimer laser
- beam delivery system
- UP ton of 1000Hz


Excimer of laser from Coherent of acres available into the following UV lasers wavelengths: 157 Nm, 193 Nm, 248 Nm, 308 Nm and 351 Nm.