Selected product

Variable RF frequency signal generator Comdel

Performance:

The CDX dual frequency RF generator comes in a 1000 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to 2 MHz.

Applications:

This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing.

Features:

Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements

Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant

Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions

Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions

Unique power monitoring in the low-frequency section measures delivered power into any impedance load

Optional phase locked output in the low- frequency section eliminates the need for a matching network in many applications