Thermocouple for epitaxial reactor
Conax Technologies
Conax manufactures a complete line of thermocouples for the 150mm, 200mm and 300mm Epsilon Reactor family. They are offered in 3 versions or "Generations".
*Gen 1.0 uses quartz sheaths from the same fabricators/same specifications as those made for the standard ASM offering.
*Gen 1.1 uses quartz sheaths made to Conax specifications. The quartz is thicker and screened to promote approximately 10% - 30% longer life than the quartz used in Gen 1.0.
*Gen 2.0 uses quartz sheaths made to Conax specifications. The quartz is even thicker and/or screened to even higher standards to promote approximately 40% - 160% longer life than the quartz used in Gen 1.0.
All construction of the sensors is performed on a Laminar Flow Table providing a Class 100 environment. Sensors are placed in a vacuum chamber and filled with bottled-dry air, then sealed in double bags. All sensor wire is manufactured to Special Limits of Error standards and calibration data is available for the sensor wires at 600C, 900C, 1100C and 1200C at no-charge. Custom calibration services are also available. Platinum/Rhodium trade-in program is available.
Many versions are on the shelf and can ship with one day's notice. Please contact us for more information.
(*)Epsilon is a registered trademark of ASM International. Neither Conax Technologies nor its products are affiliated with, approved or sponsored by ASM International.
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