Ceramic vacuum chuck
Coorstek
Solutions Developed Specifically for Wafer Handling
As a leader in technical ceramics for wafer processing equipment, CoorsTek understands advanced semiconductor manufacturing and constantly develops new materials, designs, and processes to optimize yields and extend product life.
Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications.
We offer:
* Ultra-flat capabilities
* Mirror polish
* Exceptionally lightweight
* High stiffness
* Low thermal expansion
* Large size capability - 300 mm and beyond
* Extreme wear resistance
High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, CoorsTek produces high-quality, top-performance components.
You'll find our materials:
* Reduce the effect of particulate contamination
* Offer ultra-clean purity
* Minimize wafer contact
* Resist corrosion in aggressive chemical cleaning
Typical applications include:
* Lithography
* Inspection
* Wafer cleaning
* Non-vacuum process chambers
