Laser-based wafer sorter / marker CORNING

Corning Tropel continues its tradition of providing innovative metrology solutions and tools to semiconductor wafer manufacturers by introducing UltraSort a patented wafer flatness analysis system for rapid, repeatable, accurate, non-qualification of wafers.

UltraSort continues Corning Tropel’s 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer manufacturing, this automated system offers the utmost in rapid, repeatable, accurate, non-contact qualification of silicon and alternative substrate wafers.

UltraSort is an automated wafer flatness analysis system that includes cassette-to-cassette wafer handling with user configurable sorting capability.

This Class 100 cleanroom compliant system integrates a grazing-incidence interferometer with industry standard robotic handling.

The UltraSort can be configured to measure wafer sizes from 2 inches to 8 inches in diameter, and is well suited for a variety of different materials including gallium arsenide, sapphire, quartz, germanium and silicon.

More specifications...