Laser-based wafer sorter / marker
CORNING
The Tropel UltraSort is a fully automated, non-contact metrology tool designed for fast and accurate measurement of semiconductor wafers ranging in sizes from 2 inches to 8 inches in diameter. The user-configurable menu software allows the operator to define the sorting criteria via cassette-to-cassette wafer handling.
The UltraSort is capable of measuring a variety of materials including silicon, gallium arsenide, sapphire, quartz, germanium, and others. This Class 100 cleanroom-compliant system integrates a grazing-incidence interferometer with industry-standard robotic handling.
-
video
