Circular magnetron Dexter Magnetic Technologies

Dexter's patented circular magnetron guns (T-Guns™) have been specifically engineered for the demanding requirements of data storage media producers. Integration with a new system or retrofitting an existing system is facilitated by our innovative, patented design and control interface.

>Programmable speed: 0 to 500 RPM
>Superior mechanical robustness to withstand the high mechanical loading created by the high strength manget array/target interaction
>High radial anisotropy at ID, MD and OD during sputter
>Programmable magnet phasing
>Power: 120 VAC 60 Hz, 50Hz
>Optimized for dual cathode sputtering
>Designed to retrofit Intevac® 250B and Canon ANELVA 3010 systems
>Typical Deposition Rate: 61 A/kWsec at 3 kW
>Sputter power 3 kW
>Station includes two rotary mechanisms, vacuum chamber, target clamps, spacers and stand-offs
>Simplified, lower cost, rotating magnetron system
>Robust mechanical structure will work with low PTF SUL materials
>Programmable recipe variables include: rotational speed and phase angle
>Dexter target removal/load tool required

*Note that Dexter also offers the patented Z-Gun Magnetron Sputter Source.