Custom plasma surface treatment machine
100 L | TETRA-100-LF
Diener electronic GmbH + Co. KG
Special plasma system Tetra-100-LF-PC:
The production plasma system Tetra-100 with 100 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-100:
Type: Plasma etcher Tetra-100-LF-PC with automatic door:
Technical Data:
Plasma etcher Tetra-100-LF-PC
switchgear cabinet :
W 2000 mm, H 2200 mm, D 2000 mm
chamber:
W 700 mm, H 200 mm, D 700 mm
chamber volume :
approx. 100 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(otional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
automation:
The system has a drawer door
The production plasma system Tetra-100 with 100 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-100:
Type: Plasma etcher Tetra-100-LF-PC with automatic door:
Technical Data:
Plasma etcher Tetra-100-LF-PC
switchgear cabinet :
W 2000 mm, H 2200 mm, D 2000 mm
chamber:
W 700 mm, H 200 mm, D 700 mm
chamber volume :
approx. 100 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(otional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
automation:
The system has a drawer door
