Automated atomic force microscope (AFM)
DME - Danish Micro Engineering A/S
The system consists of one of our DS 95 AFM scanner mounted in our largest standart microscope stage. This setup allows high resolution AFM on large samples as for example 150mm silicon wafers.
The 150mm movable granite object table and a positioning accuracy of 100 nm is the ideal solution for fully automated routine measurements, and gives the highest AFM measurement stability.
With the push of a button, you can switch between a high resolution, conventional microscope with DIC function and the AFM scanner, thus combining a quick visual control with a high resolution AFM measurement. The repositioning problems of working with more examination methods are totally eliminated. Upon request, we can include other measuring equipment also.
