Combined scanning electron (SEM) and atomic force microscope (AFM)
DME - Danish Micro Engineering A/S
A fully integrated SEM / AFM combination tool for routine measurements. A single software interface enables AFM and SEM operation as well as combination measurements at the push of a button. Based on a Zeiss Auriga® and a special version of our UHV AFM, this instrument represents the non-plus-ultra surface characterization tool. Watch your AFM tip while scanning and interacting with the surface, generate combined AFM and SEM images, sharpen the AFM tip yourself and obtain information no other microscope can provide. The Auriga® system is a triple system of SEM, FIB, and AFM, where all methods operate at the same point in space. This integrated system is available on request also with other Zeiss electron microscopes.
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