Custom nano-positioning system
DSM
An example of this type of custom system development is shown in the adjacent picture. The "Nanopress" was developed for mechanical break junction experiments and stress testing of thin films deposited onto silicon substrates. This particular version incorporates capacitive displacement and a load cell sensors.
The basic system's hardware design includes a coarse adjustment capability of 1.5 mm for specimen loading and a piezo actuator that provides 30 microns of precision motion for the actual test procedures. A capacitive probe provides nanometer-level displacement feedback that is fed into DSM's SA piezo amplifier and used to establish the system's servo control.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage?
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