Flexure guided piezoelectric positioning actuator DSM
100 µm - 2 mm

DSM’s FlexFrame PiezoActuator(TM) series is a family of mechanically amplified, flexure-guided piezo actuators for precision motion control and positioning applications. The actuators feature solid-state flexure hinges to eliminate backlash and stiction.

Standard piezo actuator designs offer displacement capabilities ranging from a few microns up to 2 mm, and the actuators typically feature low voltage (150-200V) piezo material. Custom designs can be produced for unique displacement ranges, design stiffness, and environmental considerations (temperature, vacuum, non-magnetic, etc.), DSM's piezoelectric actuators can also be configured with integrated displacement feedback sensors for closed-loop micropositioning and nanopositioning.

DSM's FlexFrame PiezoActuator(TM) design allows for high displacement performance in an extremely low profile package. Custom mounting conditions can be integrated into the design.

DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage?

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