Flexure guided piezoelectric positioning stage DSM
1000 µm

DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.

DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.

In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using DSM's SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.

DSM welcomes custom requests for flexure-guided piezo actuator designs.

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