Miniature piezo nano-positioning stage with sub-nanometer resolution DSM
80 µm ; 0.75 N/µm ; 150V

DSM's flexure-guided piezoelectric actuators and stages are linear actuators for precision motion control and positioning applications. Our piezo actuators can be custom designed for specific micropositioning, nanopositioning, and scanning application requirements including vacuum compatibility and non-magnetic environments.

The FlexFrame PiezoActuator™ product family uses solid-state flexures as pivot joints to provide smooth, stiction-free and backlash-free motion for critical positioning applications. FlexFrame products are lever mechanisms that mechanically amplify the output motion of piezoelectric elements. Piezo actuators require no lubrication, and because there are no internal components sliding on each other, there are no particulates generated from the actuator's motion.

The standard FPA series within the FlexFrame family offers linear travel ranges between 80µm and 2mm. The compact designs are well suited to many positioning applications and come standard in durable, non-corrosive stainless steel or titanium designs configured with mounting interfaces to match a customer’s requirements.

The actuator assemblies are mechanically preloaded to ensure bidirectional operation, thus providing increased resilience to mechanical loads when compared to non-preloaded actuators. The resulting mechanism provides high-stroke operation in an exceptionally small package.

We invite custom design inquiries. What "mission critical motion control" requirement can we help you with?

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