Dry running vacuum pump EDWARDS

The Edwards iF dry pumps are specifically designed to provide the high gas throughputs and fast pump-down times required by the latest generation of flat panel display (FPD) manufacturing tools. The iF pumps use proven, reliable screw and roots pumping technologies, feature intelligent monitoring and are fully compatible with the FabWorks network system.


iF1800 Dry Pump

The iF1800 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools.

Building on the proven quality and reliability of Edwards products, the iF1800 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput.

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