Turbomolecular vacuum pump iXL

drysingle-stageplasma

The iXL series is a range of low energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. Fast chamber pump down and extremely low power usage The iXL600(N) and iXL1000(N) dry pumps are among the smallest and quietest pumps available for light duty applications The iXL600M and iXL1000M variants are process hardened and specially designed for dielectric (oxide) etch and other similar applications The iXL600(N) and iXL1000(N) dry pumps feature high pumping speed and low energy consumption The iXL900R is the fastest loadlock pump currently available in its class for FPD loadlock applications. Customers can significantly reduce their operating costs and installation times with this new pump, which is particularly well suited to the largest loadlock chambers used for plasma vapour deposition (PVD) applications. In addition, customers will need fewer pumps per loadlock chamber, which reduces installation time, systemisation costs, maintenance and utilities consumption. A Green Mode allows reduced utilities usage during idle periods, lowering costs and helping to improve your environmental performance