Dry running vacuum pump
103 m3/h | iH80 series EDWARDS

Optimized utilities consumption.
No preventative maintenance required.
Cantilevered shafts and specially profiled rotors for better handling of particles.
Reserve motor power also maximizes reliability on harsh-duty CVD applications.
Corrosion resistant materials allow pumping of corrosive gases.
Higher operating temperatures provide ample margin to prevent gas condensation.
The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.