Dry running vacuum pump
170 m3/h | EPX180N series
EDWARDS
Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
Applications
The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
The EPX 'N' Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected:
Load Lock
Transfer Chamber
PVD sputtering
Ashing/PR Strip
Dieletric Etch
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