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High temperature heat pipe
150 °C | TMS series EDWARDS

  • high temperature heat pipe 150 °C | TMS series EDWARDS
The Temperature Management System (TMS) is pipe heating and insulation that ensures condensable by-products from semiconductor processes remain gaseous until they reach the abatement device or trap. TMS helps prevent pipe blockages and associated unplanned downtime.

TMS incorporates specially designed moulded silicone rubber heaters and silicone foam insulation jackets. It is designed to fit both exhaust lines and forelines of any configuration.
Applications
Heated lines are beneficial in reducing downtime for certain semiconductor processes, these include:

Metal Etch
LPCVD Nitride
Tungsten CVD
Tungsten Etch
Polysilicon Etch
TEOS CVD / BPSG etc.

More specifications...



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