Maglev hybrid turbomolecular vacuum pump
max. 800 l/s | STPA803C series EDWARDS

Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Technology
Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 80000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

Proven reliability.
Clean oil-free high vacuum.
Complete range from 300 to 4500 l s-1.
Application specific models.
Very low noise and vibration.
Low cost of ownership.
Virtually maintenance free.
Installation in any orientation.
Full remote control interface.
Supported globally by Edwards

Proven magnetic bearing technology