Maglev hybrid turbomolecular vacuum pump (integrated controller)
max. 300 l/s, ISO100K | STP-iX455 series
EDWARDS
The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 l/s pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Technology
Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 70000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Proven reliability.
Clean oil-free high vacuum.
Complete range from 300 to 4500 l s-1.
Application specific models.
Very low noise and vibration.
Low cost of ownership.
Virtually maintenance free.
Installation in any orientation.
Full remote control interface.
Supported globally by Edwards
Proven magnetic bearing technology
The pump features 450 l/s pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Technology
Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 70000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Proven reliability.
Clean oil-free high vacuum.
Complete range from 300 to 4500 l s-1.
Application specific models.
Very low noise and vibration.
Low cost of ownership.
Virtually maintenance free.
Installation in any orientation.
Full remote control interface.
Supported globally by Edwards
Proven magnetic bearing technology
