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XYZ stage

XYZ piezo nano-positioning stage


Elliot GoldTM Series XYZ flexure stage fitted with piezo actuators providing 25 µm of piezo and 2mm of manual adjustment in each of the three axes. This system can be controlled either via a simple piezo controller or an Elliot Scientific Device Automated Alignment System (DALi2).

Ultra-stable patented* design XYZ flexure stage
Minimal arcuate displacement
XYZ Piezo adjusters
25 µm piezo adjustment travel
10 nm resolution
2mm coarse manual travel
Orthogonal alignment grooves
4.5kg load capacity

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