Liquid filter Planarcap® LPX

capsuledepthfor sludge

Planarcap® LPX Disposable Filters Point-of-use disposable filters for silica and alumina abrasives for oxide and copper CMP Designed for use with silica and alumina slurry solutions – most typically used in copper, ILD, STI and tungsten CMP applications Available in a wide range of retention ratings from 1 µm to 5 µm Meets the needs of point-of-use CMP slurry filtration applications Available as a disposable filters with Flaretek® fittings All-polypropylene construction with pleated filtration media Materials: Medium: Pleated depth polypropylene Core, cage and shell: Polypropylene Connections: Inlet/outlet: 3/8” or 1/4” Flaretek® fitting Vent/drain: 1/4” Flaretek® fitting* Maximum operating conditions: Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C Maximum forward/reverse differential pressure 0.27 MPa (2.7 bar, 40 PSID) at 20°C Maximum operating temperature: 40°C (104°F) Notes: *Part number SKNP 010L2F is available with 1/8” MNPT vent/drain