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Air filter / water / panel / high-flow
VaporSorb™ Entegris


  • Designed for:

    air, water

  • Filtration element:


  • Other characteristics:

    high-flow, chemical, low-pressure, for clean rooms

  • Flow rate:

    Min.: 1000 ft³/min (28.32 m³/min)

    Max.: 2000 ft³/min (56.63 m³/min)


VaporSorb™ Cleanroom Chemical Air Filters
Superior protection against contaminants

A unique blended media with greater surface area removes a comprehensive array of AMCs in a single filter cell
Custom blends available to meet a specific list of target AMCs
High removal efficiency >95%
Removes critical acids, bases and organics from the fab ambient to reduce contamination risk
Low pressure drop reduces energy costs
Can be installed in built-up front/rear-access frame banks or side access housings or in ceiling-mounted fan units
Materials of construction certified zero off gas
Optimized for cleanroom, high-flow make up air, Airborne Molecular Contamination Control
Removes a comprehensive array of AMCs in single filter cell

Rated air flow:
242412: 2000 CFM at 500 ft/min. face velocity (2.54 m/s)

122412: 1000 CFM at 500 ft/min. face velocity (2.54 m/s)
Airflow resistance:
0.35" water gauge @ 500 ft/min. (2.4 m/s)
Maximum operating temperature:
49°C (120°F)


Other Entegris products