Air diffuser Chambergard™ II Max

Chambergard™ II Max Gas Diffuser High volume through and rapid venting to atmosphere gas diffuser Provides high-volume throughput and rapid venting to atmosphere Removal of particles greater than 0.003 µm from incoming gas minimizes defects on wafers Recommended for flat panel display and photovoltaic industries Materials: Membrane: PTFE Supports: PFA Fitting/mesh cover: 316L stainless steel Removal rating: ≥ 99.9999999% removal of ≥ 0.003 µm particles in gas Downstream cleanliness: Cleanliness 0.01 µm Maximum differential pressure1: 2.5 bar (maximum inlet pressure is 1.4 bar when high-vacuum state) Maximum operating temperature2: 120ºC (248ºF) Warranty: 3 year or 1,000,000 cycles3 Note: 1at room temperature and in inert gases 2in inert gases 3at room temperature, in inert gases and differential pressure ≥ 5 bar