Wafer control module VULCANO XYZ3TH

6-axis

The VULCANO XYZ3TH platform is made up of the standard VULCANO XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. Characteristics - Compact footprint - Nanometer position stability - High dynamics: 2.5 g, 1.5 m/s - Low move and settle times - ISO1 clean room compatible - Tip-Tilt correction over ±0.1° - Double Z integration - Built-in gravity compensator in Z - Outstanding Z straightness - Enhanced Z repeatability and jitter - Ability to correct stage flatness - Built-in vacuum supply at chuck level