Direct-drive rotary axe DXR+

for electronic applcationsfor semiconductorscompact

The DXR+ is a rotary module of ETEL featuring a compact design, light mass, large hollow shaft and providing the right performance to cost ratio for mid-end applications in semiconductor and electronics. The DXR+ brings major improvements in terms of stiffness which has a direct impact on the control bandwidth of the XY stage that is supporting it. The DXR+ module can be operated from 48 VDC up to 300 VDC bus voltage. It can be driven by an AccurET modular 48 or 300, or by an AccurET VHP for better position stability requirements. The DXR+ module provides a right solution to cope with any applications requiring: - Smoothness of motion - Mid-end type of accuracy requirements (typically around 5 µm runout) - Position stability in the 100 nm range @ 150 mm radius The use of this module is suitable for, but not limited to: - wafer process control, wafer dicing - wafer scribing - laser annealing -solar cell manufacturing - etc Main specifications : - Bidirectional repeatability ±2 arcsec at ±3sigma - Position accuracy : down to ±30 arcsec (w/o calibration) & down to ±3 arcsec after calibration - Speed up to 400 rpm - Position stability ±0.2 arcsec - High speed stability capabilities