Scanning electron microscope (SEM) for semiconductors FEI Company

Validate TEM and SEM samples, faster.

For advanced semiconductors, light microscopes lack resolution to ensure that SEM and TEM samples include regions of interest. If you can't use a DualBeam™ to prepare and validate every sample, Phenom™ can help. Now, FA labs can dedicate high-resolution SEMs to FA work, offloading routine work without outsourcing. The Phenom is easy for engineers to use, fits on a desktop, does not require special environmental preparations, and costs less than many high-end optical microscopes.

Phenom™ is a high-resolution personal electron microscope with an optical camera for never-lost navigation. Its innovative touch-screen user interface and control knob let you quickly produce high-quality electron microscope images—with little or no training. Phenom can handle a wide range of samples with minimal preparation. Samples are loaded instantly with our patented low vacuum load-lock technology. SEM images are ready within 30 seconds. Phenom software lets users make precise on-screen feature measurements. Images are saved on a USB memory stick or network storage location for off-line analysis and distribution.

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