2-axis inclination sensor / digital / capacitive / MEMS
SI First Sensor AG



  • Number of axes:


  • Output:


  • Technology:

    capacitive, MEMS

  • Inclination:

    Min.: -90 °

    Max.: 90 °

  • Resolution:

    0.0015 °, 0.004 °


The capacitive inclination sensors from First Sensor are based on single crystal silicon and utilize the latest micromachining technology. The devices achieve large signal-to-noise ratios and excellent stability over temperature which allows them to detect smallest changes in inclination. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

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