Metering bellow pump for semiconductor industry
Fluorosat
Their pumping frequency is much lower than an equivalent diaphragm pump and results in an extended life. Due to this low frequency and amplitude of the bellows pump, we guarantee a lower level of particle contamination. All PFD pump wetted components are manufactured with TEFLON® (PFA HP, PTFE and FEP). All other components are manufactured with high technology materials; e.g. PVDF and PEEK.
The use of material chemically inactive allows no ionic contamination. This pump is assembled in cleanroom.
Flow rate: 20 l/min
Max. suction head: 3,5 m
Max. air pressure: 5 bar
Max. back pressure: 4 bar
Max. air consuption: 13,5 m^3/h
Max. air connection: 4 mm I.D.
Weight: 4 kg
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