Non-contact surface measuring system Fries Research Technology
The MicroGlider® is the highly precise, multi-sensor platform
measuring system from FRT intended for especially accurate
measuring applications. A linear motor driven, non-contact
air bearing x-y stage guarantees best precision motion during
stage movement. Hence the MicroGlider® measures profile,
topography, roughness, and coating thickness with further
enhanced accuracy. The MicroGlider® is also equipped
with a CCD camera for easy sample positioning and can
automatically perform predefined measurements.