3D confocal microscope CFM
FRT, Fries Research & Technology
The confocal measuring principle used in the FRT CFM sensor is an established, non-contact, measuring method for very fast, high-resolution 3D analyses of small structures in research and production like MEMS, microlenses, defects and more. Beside the investigation of microstructures, the sensor is also used for roughness measurements and the capture and analysis of 3D topography. Due to its large-area, confocal measuring principle, meaningful results are generated in less than 10 seconds. The field of view can be extended through the integrated stitching function.
