FRT, Fries Research & Technology

Infrared interferometer
CWL IR FRT, Fries Research & Technology

  • infrared interferometer CWL IR FRT, Fries Research & Technology
The FRT CWL IR is an interferometric film thickness sensor with an IR light source. The sensor was developed for the thickness measurement of materials
that are transparent in near infrared light. Measurements can be conducted as single point and profile measurements or film thickness mappings of larger areas. Also, the sensor can be used to characterize multilayer film systems. Typical applications are the characterization of semiconductor and sapphire wafers, glass as well as films. Another application is the measurement of adhesive layers between wafers.



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